Internship, Process Engineer, Terafab (Fall 2026)

Tesla is building a vertically integrated semiconductor factory, Terafab, that integrates logic, memory, packaging, testing, and lithography mask production. The Process Engineer Intern will help develop, optimize, qualify, and improve ion implantation processes across logic and memory devices, supporting metrology, yield improvement, tool readiness, and advanced implantation techniques.

What you'll do:

• Help develop and qualify high-current, medium-current, and low-energy ion implantation processes, including source/drain, substrate, channel, well, and halo implants for logic and memory devices
• Help optimize critical implant parameters: dopant species, energy, dose, tilt, rotation, beam current, and damage engineering to achieve precise junction profiles, sheet resistance, and leakage performance
• Help with ion implant processes
• Help qualify implant tools from installation to production readiness, including beam calibration, uniformity, angle control, wafer charging management, and chamber matching
• Help analyze implant process, dopant distribution, and device performance using first-principles, physics-based approaches to understand implantation mechanisms, amorphization, channeling, and transient enhanced diffusion (TED) interactions
• Help with root cause analysis for profile shifts, device param variation, and yield issues; establish inline metrology and control strategies; and drive systematic yield improvement
• Help drive development of next-generation implantation techniques, including plasma doping (PLAD) and advanced damage/activation strategies for sub-2nm nodes and specialized applications

What they're looking for:

• Our internship program is for students who are actively enrolled in an academic program
• You must be able to work 40 hours per week on-site
• Currently pursuing a degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or related field
• Experience ion implanters
• Proficiency with implant metrology
• DOE skills and statistical analysis capability
• Excellent collaboration skills with the ability to work proactively across diffusion/anneal, thin films, integration, and equipment engineering teams

Benefits:

• Medical plans > plan options with $0 payroll deduction
• Family-building, fertility, adoption and surrogacy benefits
• Dental (including orthodontic coverage) and vision plans. Both have an option with a $0 payroll contribution
• Company Paid (Health Savings Account) HSA Contribution when enrolled in the High Deductible Medical Plan with HSA
• Healthcare and Dependent Care Flexible Spending Accounts (FSA)
• 401(k), Employee Stock Purchase Plans, and other financial benefits
• Company Paid Basic Life, AD&D, and short-term disability insurance (90 day waiting period)
• Employee Assistance Program
• Sick and Vacation time (Flex time for salary positions), and Paid Holidays
• Back-up childcare and parenting support resources